Method for evaluating reliance level of a virtual metrology system

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2007, Pages 1590-1596

  Cheng, Fan Tien ^a,b   Chen, Yen Tung ^a,b   Su, Yu Chuan ^a,c   Zeng, Deng Lin ^b  

^a IEEE   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c FAR EAST UNIVERSITY   (Taiwan)

Author keywords

Degree of similarity; Global similarity index (GSI); Individual similarity index (ISI); Manufacturability; Reliance index (RI); Reliance level; Virtual metrology

Indexed keywords

DEGREE OF SIMILARITY; GLOBAL SIMILARITY INDEX (GSI); INDIVIDUAL SIMILARITY INDEX (ISI); MANUFACTURABILITY; RELIANCE INDEX (RI); RELIANCE LEVEL; VIRTUAL METROLOGY;

MEASUREMENT THEORY; PARAMETER ESTIMATION; SEMICONDUCTOR DEVICES; THIN FILM TRANSISTORS; VIRTUAL REALITY;

PRODUCTION ENGINEERING;

EID: 36348945773     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2007.363551     Document Type: Conference Paper

References (9)

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