Metal piezoelectric semiconductor field effect transistors for piezoelectric strain sensors

Applied Physics Letters

Volumn 85, Issue 7, 2004, Pages 1223-1225

  Wu, Yuh Renn ^a   Singh, Jasprit ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL CHARGE; GATE VOLTAGE; STRAIN SENSORS; STRESS SENSOR PROPERTIES;

BARIUM COMPOUNDS; ELECTRIC POTENTIAL; FIELD EFFECT TRANSISTORS; GALLIUM NITRIDE; GATES (TRANSISTOR); HETEROJUNCTIONS; MICROPROCESSOR CHIPS; MOLECULAR BEAM EPITAXY; NETWORKS (CIRCUITS); PIEZOELECTRIC DEVICES; SEMICONDUCTOR DEVICES; SILICON SENSORS; TITANIUM COMPOUNDS;

THICK FILMS;

EID: 4444332996     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1784039     Document Type: Article

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