An improved design for parallel plate MEMS variable capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2004, Pages 865-868

  Bakri Kassem, Maher ^a   Mansour, Raafat R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER BEAMS; PARALLEL PLATES; SUPPORTING BEAMS; VARIABLE CAPACITORS;

ACTUATORS; CAPACITORS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; LIGHT; NITRIDES; THICKNESS CONTROL; TUNING;

MICROELECTROMECHANICAL DEVICES;

EID: 4444315496     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Bakri-Kassem, M.; Mansour, R.R.; "Two movable plate nitride loaded MEMS variable capacitor" Microwave Symposium Digest, 2003 IEEE MTT-S International, Volume: 1, 8-13 June 2003 Page(s): 483-486 vol.1
2. Peroulis, D.; Katehi, L.P.B.;" Electrostatically-tunable analog RF MEMS varactors with measured capacitance range of 300%" Microwave Symposium Digest, 2003 IEEE MTT-S International, Volume: 3, 8-13 June 2003 Page(s): 1793-1796 vol.3
3. Hoivik, N.; Michalicek, M.A.; Lee, Y.C.; Gupta, K.C.; Bright, V.M.; "Digitally controllable variable high-Q MEMS capacitor for RF applications" Microwave Symposium Digest, 2001 IEEE MTT-S International, Volume:3,20-25May2001 Page(s): 2115-2118 vol.3
4. Faheem, F.F.; Hoivik, N.D.; Lee, Y.C.; Gupta, K.C.; "Post-enabled precision flip-chip assembly for variable MEMS capacitor" Microwave Symposium Digest, 2003 IEEE MTT-S International, Volume: 3, 8-13 June 2003 Page(s): 1927-1930 vol.3
5. Aleksander Dec, and Ken Suyama, "Micromachined Electro-Mechanically Tunable Capacitors and Their Applications to RF IC's" IEEE Transactions on Microwave Theory and Techniques, vol. 46, no. 12, p. 2587 December 1998.
6. http://www.memscap.com
7. Microsystem Design book, Stephen. D. Senturia, Kluwer Accademic Publishers. Fourth Printing 2002
8. www.coventor.com