A LOW-VOLTAGEFORCE-BALANCEDBAROMETRICPRESSURESENSOR

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1996, Pages 529-532

  Gogoi, B P ^a   Mastrangelo, C H ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTROSTATICS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; MICROMACHINING; PRESSURE MEASUREMENT;

BAROMETRIC PRESSURE; EXTERNAL PRESSURES; FULL-SCALE RANGES; LOW VOLTAGES; PRESSURE RANGES; VOLTAGE ELECTRONICS;

ATMOSPHERIC PRESSURE; SENSORS;

BAROMETRIC PRESSURE SENSOR; ELECTROSTATIC FORCES; LOW VOLTAGE ELECTRONICS;

EID: 0030382698     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1996.585571     Document Type: Conference Paper

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