Recent improvements in the integration of field emitters into scanning probe microscopy sensors

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1135-1138

  Beuer, S ^a   Rommel, M ^a   Petersen, S ^a   Amon, B ^a   Sulzbach, Th ^b   Engl, W ^b   Bauer, A J ^a   Ryssel, H ^a,c  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b NANOWORLD SERVICES GMBH   (Germany)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

EBID carbon; Integrated field emitter; SPM sensors

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; ELECTRON BEAMS; SCANNING PROBE MICROSCOPY; SEMICONDUCTOR MATERIALS;

CONTROL ELECTRODES; ELECTRON BEAM INDUCED DEPOSITION; INTEGRATED FIELD EMITTERS;

FIELD EMISSION;

EID: 44149126781     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.048     Document Type: Article

References (5)

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