Optimization of Pt tip field emitter array fabricated using focused ion and electron beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1598-1601

  Jarupoonphol, W ^a   Murakami, K ^a   Sakata, K ^a   Takai, M ^a   Hosono, A ^b   Okuda, S ^b  

^a OSAKA UNIVERSITY   (Japan)

^b MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; GOLD; ION BEAMS; OPTIMIZATION; PLATINUM;

FIELD EMITTER ARRAYS (FEA);

ELECTRON BEAMS;

EID: 0141458140     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1569932     Document Type: Conference Paper

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