Fabrication and characterization of Ta2O5 photonic feedback structures

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1425-1428

  Wahlbrink, T ^a   Bolten, J ^a   Mollenhauer, T ^a   Kurz, H ^a   Baumann, K ^b   Moll, N ^b   Stoferle T ^b   Mahrt, R F ^b  

^a AMO GMBH   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Electron beam lithography; Electron photonic feedback structures; Nanopatterning; Organic laser

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FEEDBACK; REACTIVE ION ETCHING; REFRACTIVE INDEX; TANTALUM COMPOUNDS;

NANOPATTERNING; ORGANIC LASER STRUCTURES; PHOTONIC FEEDBACK STRUCTURES;

PHOTONIC CRYSTALS;

EID: 44149120987     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.059     Document Type: Article

References (8)

1. Tessler N., Denton G.J., and Friend R.H. Nature 382 (1996) 695
2. Kallinger C., et al. Adv. Mater. 10 (1998) 920
3. McGehee M.D., and Heeger A.J. Adv. Mater. 12 (2000) 1655
4. Harbers V.R., et al. Appl. Phys. Lett. 87 (2005) 151121
5. WVASE database, J.A. Woollam Co. Inc.
6. Maile B., et al. Jpn. J. Appl. Phys. 39 (2000) 6836
7. Wahlbrink T., et al. Microelectron. Eng. 84 (2007) 1045
8. Henschel W., et al. J. Vac. Sci. Technol. B 21 (2003) 2018