Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 3, 2007, Pages

  Kessels, Ḿlanie V ^a   El Bouz, Marwa ^a   Pagan, Robin ^b   Heggarty, Kevin ^a  

^a ECOLE DES MINES DE NANTES   (France)

^b MIVA Technologies GmbH   (Germany)

Author keywords

Illumination; Liquid crystals; Lithography; Micro optics; Real time imaging; Spatial light modulators

Indexed keywords

COST EFFECTIVENESS; LIQUID CRYSTAL DISPLAYS; MICROSTRUCTURE; PIXELS; PRODUCT DESIGN;

MICRODISPLAY MODULE; MULTILEVEL MICROSTRUCTURES;

LITHOGRAPHY;

EID: 40049093869     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2767331     Document Type: Article

References (27)