Biological lithography: Improvements in DMA synthesis methods

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3163-3167

  Kim, C ^a   Li, M ^a   Rodesch, M ^a   Lowe, A ^a   Richmond, K ^a   Cerrina, F ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL LITHOGRAPHY; DIGITAL MICROMIRROR DEVICE (DMD); ERROR REDUCTION; MICROARRAYS;

BIOSENSORS; COMPUTER SIMULATION; ERROR ANALYSIS; LIGHT SCATTERING; LITHOGRAPHY; MONTE CARLO METHODS; OXIDATION; PHOTONS; RNA; SYNTHESIS (CHEMICAL);

DNA;

EID: 13244249988     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1824066     Document Type: Conference Paper

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