Characteristics of diamond-like carbon film deposited by filter arc deposition

Journal of Materials Processing Technology

Volumn 203, Issue 1-3, 2008, Pages 117-120

  Weng, Ko Wei ^a   Han, Sheng ^b   Chen, Ya Chi ^c   Wang, Da Yung ^a  

^a MINGDAO UNIVERSITY   (Taiwan)

^b NATIONAL TAICHUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Adhesion; Diamond like carbon; Filter arc deposition; Residual stress

Indexed keywords

ADHESION; DEPOSITION; MICROHARDNESS; RESIDUAL STRESSES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CATHODE CURRENT; FILTER ARC DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 43849113424     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.09.061     Document Type: Article

References (13)

1. 3 contents of diamond-like carbon (DLC) synthesized by plasma immersion ion implation-deposition. Surf. Coat. Technol. 156 (2002) 289
2. Han S., Lin J.H., Wang G.H., and Shih H.C. The effect of preferred orientation on the mechanical properties of chromium nitride coatings deposited on SKD 11 by unbalanced magnetron sputtering. Mater. Lett. 57 (2003) 1202
3. Han S., Chen H.-Y., Chang Z.-C., Lin J.-H., Yang C.-J., Lu F.-H., Shieu F.-S., and Shih H.C. The effect of metal vapor vacuum arc Cr-implanted interlayer on the microstructure of CrN film on silicon. Thin Solid Films 436 (2003) 238
4. Hauert R. A review of modified DLC coatings for biological applications. Diamond Relat. Mater. 12 (2003) 583
5. + ions: experimental studies. Diamond Relat. Mater. 4 (1995) 318
6. Lu F.-H., and Chen H.-Y. XPS analyses of TiN films on Cu substrates after annealing in the controlled atmosphere. Thin Solid Films 355-356 (1999) 374
7. Ma C.-H., Huang J.-H., and Chen H. Residual stress measurement in textured thin film by a grazing-incidence X-ray diffraction. Thin Solid Films 418 (2002) 73
8. Paik N. Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source. Surf. Coat. Technol. 200 (2005) 2170
9. Powder Diffraction File, 1996. Joint Committee on Powder Diffraction Standard, Card 11-0065. ASTM, Philadelphia, PA.
10. 3 composition. Diamond Relat. Mater. 5 (1996) 433
11. Taki Y., and Taki O. XPS structural characterization of hydrogenated amorphous carbon thin films prepared by shielded arc ion plating. Thin Solid Films 316 (1998) 45
12. Voevodin A.A., Donley M.S., and Zabinski J.S. Pulsed laser deposition of diamond-like carbon wear protective coatings: a review. Surf. Coat. Technol. 92 (1997) 42
13. Yan X., Xu T., Chen G., Yang S., and Liu H. Study of structure, tribological properties and growth mechanism of DLC and nitrogen-doped DLC films deposited by electrochemical technique. Appl. Surf. Sci. 236 (2004) 328