Investigation of dynamic disturbance quantities in piezoresistive silicon sensors

Microelectronics Reliability

Volumn 42, Issue 9-11, 2002, Pages 1819-1822

  Hoa, Phan L P ^a   Suchaneck, G ^a   Gerlach, G ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

UNCERTAINTY ANALYSIS;

DYNAMIC DISTURBANCES; ELECTRICAL SOURCES; HUMID ENVIRONMENT; LOW FREQUENCY REGIONS; MEASUREMENT UNCERTAINTY; MECHANICAL AND ELECTRICAL; PASSIVATION LAYER; SEMICONDUCTOR SENSORS;

SILICON SENSORS;

EID: 43849105881     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00238-X     Document Type: Conference Paper

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