Piezoresistive effect - stable enough for high-accuracy sensor applications?

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 377-385

  Gerlach, Gerald ^a   Nakladal, Arne ^a   Buchhold, Reinhard ^a   Baumann, Kurt ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; PASSIVATION; PRESSURE TRANSDUCERS; SILICON SENSORS;

PIEZORESISTIVE SENSORS;

PIEZOELECTRIC TRANSDUCERS;

EID: 0032299650     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)