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Volumn 144, Issue 2, 2008, Pages 267-274

Diagnostic of silicon piezoresistive pressure sensors by low frequency noise measurements

Author keywords

Noise; Noise diagnostic; Piezoresistors; Pressure sensors; Silicon sensors

Indexed keywords

ADSORPTION; CORRELATION METHODS; FREQUENCY RESPONSE; MATHEMATICAL MODELS; PHASE NOISE; RESISTORS; SILICON SENSORS;

EID: 43849104628     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.02.002     Document Type: Article
Times cited : (14)

References (15)
  • 1
    • 0029276102 scopus 로고
    • Noise as a diagnostic and prediction tool in reliability physics
    • Jevtić M. Noise as a diagnostic and prediction tool in reliability physics. Microelectron. Reliab. 35 (1995) 455-477
    • (1995) Microelectron. Reliab. , vol.35 , pp. 455-477
    • Jevtić, M.1
  • 2
    • 0024055841 scopus 로고
    • A theoretical study of transducer noise in piezoresistive and capacitive silicon pressure sensors
    • Spencer R.R., Fleischer B.M., Barth P.W., and Angell J.B. A theoretical study of transducer noise in piezoresistive and capacitive silicon pressure sensors. IEEE Trans. Electr. Dev. 35 (1988) 1289-1298
    • (1988) IEEE Trans. Electr. Dev. , vol.35 , pp. 1289-1298
    • Spencer, R.R.1    Fleischer, B.M.2    Barth, P.W.3    Angell, J.B.4
  • 3
    • 43849105881 scopus 로고    scopus 로고
    • Investigation of dynamic disturbance quantities in piezoresistive silicon sensors
    • Hoa P.L.P., Suchaneck G., and Gerlach G. Investigation of dynamic disturbance quantities in piezoresistive silicon sensors. Microelectron. Reliab. 42 (2002) 1819-1822
    • (2002) Microelectron. Reliab. , vol.42 , pp. 1819-1822
    • Hoa, P.L.P.1    Suchaneck, G.2    Gerlach, G.3
  • 4
    • 10844219973 scopus 로고    scopus 로고
    • Design optimization of a piezoresistive pressure sensor considering the output signal-to-noise ratio
    • Bae B., Flachsbart B.R., Park K., and Shannon M.A. Design optimization of a piezoresistive pressure sensor considering the output signal-to-noise ratio. J. Micromech. Microeng. 14 (2004) 1597-1607
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 1597-1607
    • Bae, B.1    Flachsbart, B.R.2    Park, K.3    Shannon, M.A.4
  • 6
    • 33646452603 scopus 로고    scopus 로고
    • Sources of excess noise in silicon piezoresistive microphones
    • Dieme R., Bosman G., Nishada T., and Sheplak M. Sources of excess noise in silicon piezoresistive microphones. J. Acoust. Soc. Am. 119 (2006) 2710-2720
    • (2006) J. Acoust. Soc. Am. , vol.119 , pp. 2710-2720
    • Dieme, R.1    Bosman, G.2    Nishada, T.3    Sheplak, M.4
  • 7
    • 43849112611 scopus 로고    scopus 로고
    • Production catalogue, IHTM-MTM, 2005, Beograd, http://www.nanosys.ihtm.bg.ac.yu.
    • Production catalogue, IHTM-MTM, 2005, Beograd, http://www.nanosys.ihtm.bg.ac.yu.
  • 8
    • 43849112927 scopus 로고    scopus 로고
    • G.F. Cerofolini, Dynamic theory of adsorption on surfaces undergoing self-similar reconstruction, Annales Universitatis Mariae Curie-Sklodowska, Lublin, Polonia LVIII-AA (2003) 3-34.
    • G.F. Cerofolini, Dynamic theory of adsorption on surfaces undergoing self-similar reconstruction, Annales Universitatis Mariae Curie-Sklodowska, Lublin, Polonia LVIII-AA (2003) 3-34.
  • 10
    • 24544459259 scopus 로고
    • 1/f noise is no surface effect
    • Hooge F.N. 1/f noise is no surface effect. Phys. Lett. A-29 (1969) 139-140
    • (1969) Phys. Lett. , vol.A-29 , pp. 139-140
    • Hooge, F.N.1
  • 11
    • 0001149533 scopus 로고
    • Lattice scattering causes 1/f noise
    • Hooge F.N., and Vandamme L.K.J. Lattice scattering causes 1/f noise. Phys. Lett. A-66 (1978) 315-316
    • (1978) Phys. Lett. , vol.A-66 , pp. 315-316
    • Hooge, F.N.1    Vandamme, L.K.J.2
  • 12
    • 0024031755 scopus 로고
    • Impurity concentration dependence of the 1/f noise parameter α in silicon
    • Jevtić M.M. Impurity concentration dependence of the 1/f noise parameter α in silicon. Solid-State Electron. 31 (1988) 1049-1052
    • (1988) Solid-State Electron. , vol.31 , pp. 1049-1052
    • Jevtić, M.M.1
  • 13
    • 33751234965 scopus 로고    scopus 로고
    • Dissociative adsorption of molecular hydrogen on silicon surfaces
    • Dürr M., and Höfer U. Dissociative adsorption of molecular hydrogen on silicon surfaces. Surf. Sci. Rep. 61 (2006) 465-526
    • (2006) Surf. Sci. Rep. , vol.61 , pp. 465-526
    • Dürr, M.1    Höfer, U.2
  • 14
    • 0842281493 scopus 로고    scopus 로고
    • Observed and simulated effects of certain pollutants on small air ion spectra. I. Positive ions
    • Parts T.E., and Luts A. Observed and simulated effects of certain pollutants on small air ion spectra. I. Positive ions. Atmos. Environ. 38 (2004) 1283-1289
    • (2004) Atmos. Environ. , vol.38 , pp. 1283-1289
    • Parts, T.E.1    Luts, A.2
  • 15
    • 0003680984 scopus 로고
    • Maissel L.I., and Glang R. (Eds), McGraw-Hill, New York
    • In: Maissel L.I., and Glang R. (Eds). Handbook of Thin Film Technology (1970), McGraw-Hill, New York
    • (1970) Handbook of Thin Film Technology


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.