Mass sensitivity of dual mode SAW delay lines on AlN/sapphire structure

Electronics Letters

Volumn 41, Issue 22, 2005, Pages 1254-1255

  Xu, J ^a   Hu, G ^a   Auner, G W ^a   Ying, H ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DEVICES; ALUMINUM COMPOUNDS; ELECTRIC DELAY LINES; SAPPHIRE; SENSITIVITY ANALYSIS;

DUAL MODE SAW; MASS SENSITIVITIES; MASS SENSITIVITY; SURFACE MASS LOADING;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 33645281212     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20053193     Document Type: Article

References (10)

1. Ambacher, O.: ' Growth and applications of group III-nitride ', J. Phys. D, Appl. Phys., 1998, 31, p. 2653-2710
2. Elmazria, O., Mortet, V., Hakiki, M., Nesladek, M., and Alnot, P.: ' High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond ', IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2003, 50, p. 710-715
3. Didenko, I.S., Hickernell, F.S., and Naumenko, N.F.: ' The experimental and theoretical characterization of the SAW propagation properties for zinc oxide films on silicon carbide ', IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2000, 47, p. 179-187
4. Kobayashi, Y., Tanaka, N., Okano, H., Takeuchi, K., Usuki, T., and Shibata, K.: ' Characteristics of surface acoustic wave on AlN thin films ', Jpn. J. Appl. Phys., 1995, 34, p. 2668-2673
5. 3 microstructure ', J. Appl. Phys., 2004, 96, p. 212-217
6. Shackelford, J.F., and Alexander, W.: ' The CRC materials science and engineering handbook ', (CRC Press, Boca Raton, FL 2001)
7. Martin, S.J., and Ricco, A.J.: ' Effective utilization of acoustic wave sensor responses: simultaneous measurement of velocity and attenuation ', IEEE Ultrasonic Symp. Proc., Montreal, Canada 1989, 1, p. 621-625
8. Wenzel, S.W., and White, R.M.: ' Analytical comparison of the sensitivities of bulk-wave, surface-wave, and flexual plate-wave ultrasonic gravimetric sensors ', Appl. Phys. Lett., 1989, 54, p. 1976-1978
9. Ricco, A.J., and Martin, S.J.: ' Multi-frequency SAW devices for chemical sensing and materials characterization ', Sens. Actuators B, 1993, 10, p. 121-131
10. Josse, F., Bender, F., and Cernosek, R.W.: ' Guided shear horizontal surface acoustic wave sensors for chemical and biochemical detection in liquids ', Anal. Chem., 2001, 73, p. 5937-5944