Analysis of laser micromachining in silica glass with an absorbent slurry

CIRP Annals - Manufacturing Technology

Volumn 57, Issue 1, 2008, Pages 217-222

  Mitsuishi, M ^a   Sugita, N ^a   Kono, I ^a   Warisawa, S ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Glass; Laser beam machining; Three dimensional micromachining

Indexed keywords

ABSORPTION; HEAT TRANSFER; LASER APPLICATIONS; MICROFLUIDICS; MICROMACHINING; OPTICAL WAVEGUIDES;

ABSORBENT SLURRY; LASER BEAM MACHINING; LASER MICROMACHINING; MICROFLUIDIC CHIPS;

FUSED SILICA;

EID: 43649102856     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2008.03.006     Document Type: Article

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