Ultrasonic vibration drilling of microholes in glass

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 1, 2002, Pages 339-342

  Egashira, K ^a   Mizutani, K ^a   Nagao, T ^b  

^a KINKI UNIVERSITY   (Japan)

^b Tosayamada Public Health Center   (Japan)

Author keywords

Glass; Microhole; Ultrasonic vibration cutting

Indexed keywords

CRACKS; GLASS CUTTING MACHINES; GRINDING (MACHINING); ULTRASONIC CUTTING; VIBRATIONS (MECHANICAL);

MICROHOLES;

DRILLING;

EID: 0038515203     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61531-5     Document Type: Article

References (8)

1. Mizutani, K., Tanaka, Y., 1987, Lengths of Crack Extension and Upper Limits of Depth of Cut Preventing Crack Extension in Orthogonal Cutting of Ceramics -Their Estimation Using the Stress Field of the Expansion of a Cylindrical Tube-, Journal of the Japan Society of Precision Engineering, 53/11:1758-1764.
2. rffrt Blake, P., Scattergood, R., 1990, Ductile Regime Machining of Germanium and Silicon, Journal of the American Ceramic Society, 73/4:949-957.
3. Nakasuji, T., Kodera, S., Hara, S., Matsunaga, H., Ikawa, N., Shimada, S., 1990, Diamond Turning of Brittle Materials for Optical Components, Annals of the CIRP, 39/1:89-92.
4. Masuzawa, T., Fujino, M., Kobayashi, K., Suzuki, T., 1985, Wire Electrodischarge Grinding for Micromachining, Annals of the CIRP, 34/1:431-434.
5. Egashira, K., Mizutani, K., Microdrilling of Monocrystalline Silicon Using a Cutting Tool, Precision Engineering. Accepted for publication, in press.
6. Onikura, H., Ohnishi, O., Feng, J., Kanda, T., Morita, T., 1996, Effects of Ultrasonic Vibration on Machining Accuracy in Microdrilling, Journal of the Japan Society of Precision Engineering, 62/5:676-680.
7. Egashira, K., Masuzawa, T., 1999, Microultrasonic Machining by the Application of Workpiece Vibration, Annals of the CIRP, 48/1:131-134.
8. Sato, T., Mizutani, T., Kawata, K., 1985, Electro-Discharge Machine for Micro-Hole Boring, National Technical Report, 31/5:105-113.