A method for very low fluence implantations using Rutherford scattering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 9, 2008, Pages 2065-2069

  Bolker, A ^a   Richter, V ^a   Saguy, C ^a   Kalish, R ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Diamond; Minute fluence ion implantation; N V center in diamond; Qubit; RBS

Indexed keywords

ANGLE MEASUREMENT; QUANTUM THEORY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING PROBE MICROSCOPY; XENON;

MINUTE FLUENCE ION IMPLANTATION; N-V CENTER IN DIAMONDS; QUBITS;

ION IMPLANTATION;

EID: 43649090443     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.02.064     Document Type: Article

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