Monolithic fabrication of multilayer P(VDF-TrFE) cantilevers

Sensors and Actuators, A: Physical

Volumn 144, Issue 2, 2008, Pages 314-320

  Snis, N ^a   Edqvist, E ^a   Simu, U ^a   Johansson, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Microrobot; Multilayer; P(VDF TrFE); Piezoelectric; Q Factor; Resonance

Indexed keywords

COPOLYMERS; ELECTRIC FIELDS; MULTILAYERS; PRINTED CIRCUIT BOARDS; SPIN COATING;

ADHESIVE LAYERS; FREQUENCY SPECTRA; MICROROBOT; MONOLITHIC FABRICATION TECHNIQUE;

PIEZOELECTRIC ACTUATORS;

EID: 43549114520     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.01.004     Document Type: Article

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