Micromachined unimorphs and bimorphs

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2001, Pages 913-916

  Farlow, Roger ^a   Galbraith, Walter ^a   Kelly, Stephen ^a   Hayward, Gordon ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; FINITE ELEMENT METHOD; FLUORINE CONTAINING POLYMERS; LAMINATED COMPOSITES; LASER BEAM CUTTING; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

BIMORPHS; COPPER VAPOR LASER; LASER VIBROMETER; MECHANICAL BEAM THEORY; POLYVINYLIDENE FLUORIDE; UNIMORPHS;

ULTRASONIC TRANSDUCERS;

EID: 0035732674     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. An evaluation of 1-3 connectivity transducers for air-coupled applications
2. Micromachined two dimensional array piezoelectrically actuated transducers
3. Low noise techniques applied to a piezoelectric receiver for gas coupled ultrasonic flaw detection
4. Micromachining of a piezocomposite transducer using a copper vapour laser
5. Efficient generation of near diffraction limited beam quality output from medium scale copper vapour laser oscillators