Nanoscratch and nanofriction behavior of hafnium diboride thin films

Wear

Volumn 265, Issue 5-6, 2008, Pages 921-929

  Chatterjee, Abhishek ^a   Kumar, Navneet ^a   Abelson, John R ^a   Bellon, Pascal ^a   Polycarpou, Andreas A ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Elastic plastic response; Friction; Hertzian contact pressure; HfB2 coatings; Nanoscratch

Indexed keywords

COMPUTATION THEORY; FRICTION; MELTING; WEAR RESISTANCE;

ELASTIC-PLASTIC RESPONSE; HERTZIAN CONTACT PRESSURE; NANOSCRATCH;

THIN FILMS;

COMPUTATION THEORY; FRICTION; MELTING; THIN FILMS; WEAR RESISTANCE;

EID: 43549092595     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2008.02.002     Document Type: Article

References (29)

1. Rabinowicz E. Friction and Wear of Materials. second ed. (1995), Wiley, New York
2. Hutchings I.M. Tribology, Friction Wear of Engineering Materials (1992), CRC Press, Boca Raton
3. Bhushan B. Handbook of Micro/Nanotribology. second ed. (1999), CRC Press, Boca Raton
4. Bhushan B. Nano- to microscale wear and mechanical characterization using scanning probe microscopy. Wear 251 (2001) 1105-1123
5. Lee K.M., Yeo C.D., and Polycarpou A.A. Nanomechanical property and nanowear measurements for sub-10-nm thick films in magnetic storage. Exp. Mech. 47 (2007) 107-121
6. Lee J.W., and Duh J.G. Nanomechanical properties evaluation of chromium nitride films by nanoindentation and nanowear techniques. Surf. Coat. Technol. 188-189 (2004) 655-661
7. Ott R.D., Ruby C., Huang F., Weaver M.L., and Barnard J.A. Nanotribology and surface chemistry of reactively sputtered Ti-B-N hard coatings. Thin Solid Films 377-378 (2000) 602-606
8. Blau P.J. ASM Handbook, Friction, Lubrication and Wear Technology vol. 18 (1992), ASM International 432
9. Bull S.J. Can scratch testing be used as a model for the abrasive wear of hard coatings. Wear 233-235 (1999) 412-423
10. Page T.F., Riester L., and Hainsworth S.V. The plasticity response of 6H-SiC and related isostructural materials to nanoindentation: slip vs. densification. Mater. Res. Soc. Symp. Proc. 522 (1998) 113-118
11. Yu N., Polycarpou A.A., and Conry T.F. Tip-radius effect in finite element modeling of sub-50 nm shallow nanoindentation. Thin Solid Films 450 (2004) 295-303
12. Lu W., and Komvopoulos K. Nanomechanical and nanotribological properties of carbon, chromium, and titanium carbide ultrathin films. ASME J. Tribol. 123 (2001) 717-724
13. Mosch S., Grau P., and Berg G. Nanotribological measurements of sol-gel derived silica films. Mater. Res. Soc. Symp. Proc. 522 (1998) 415-420
14. Lu W., and Komvopoulos K. Nanotribological and nanomechanical properties of ultrathin amorphous carbon films synthesized by radio frequency sputtering. ASME J. Tribol. 123 (2001) 641-650
15. Meinhard H., Grau P., Berg G., and Mosch S. Hardness and flow behavior of glass in the nanometre range-an interpretation of the load dependence of the hardness. Glass Sci. Technol. 70 (1997) 333-339
16. Achanta S., Drees D., and Celis J.P. Friction and nanowear of hard coatings in reciprocating sliding at milli-Newton loads. Wear 259 (2005) 719-729
17. Vincent L., Berthier Y., Dubourg M.C., and Godet M. Mechanics and materials in fretting. Wear 153 (1992) 135-148
18. Tambe N.S., and Bhushan B. A novel AFM based approach for studying nanoscale wear. Trib. Lett. 20 (2005) 83-90
19. Bouquet L., Charlaix E., Ciliberto S., and Crassous J. Moisture-induced ageing in granular media and the kinetics of capillary condensation. Nature 396 (1998) 735-737
20. 2 and Hf-B-N hard coatings by chemical vapor deposition. Surf. Coat. Technol. 200 22-23 (2006) 6629-6633
21. Chatterjee A., Jayaraman S., Gerbi J.E., Kumar N., Abelson J.R., Bellon P., Polycarpou A.A., and Chevalier J.P. Tribological behavior of hafnium diboride thin films. Surf. Coat. Technol. 201 7 (2006) 4317-4322
22. Karr B.W., Petrov I., Cahill D.G., and Greene J.E. Morphology of epitaxial TiN(0 0 1) grown by magnetron sputtering. Appl. Phys. Lett. 70 13 (1997) 1703-1705
23. Jayaraman S., Yang Y., Kim D.Y., Girolami G.S., and Abelson J.R. Hafnium diboride thin films by chemical vapor deposition from a single source precursor. J. Vac. Sci. Technol. A 23 6 (2005) 1619-1625
24. Cullity B.D. Elements of X-ray Diffraction. second ed. (1978), Addison Wesley
25. Oliver W.C., and Pharr G.M. Improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7 (1992) 1564-1580
26. Gasch M.J., Ellerby D.T., and Johnson S.M. Ultra high temperature ceramic composites. Handbook of Ceramic Composites (2005), Springer, New York
27. Tabor D. The hardness of solids. Rev. Phys. Technol. 1 (1970) 145-179
28. Lichinchi M., Lenardi C., Haupt J., and Vitali R. Simulation of Berkovich nanoindentation experiments on thin films using finite element method. Thin Solid Films 312 (1998) 240-248
29. Ford I.J. Roughness effect on friction for multi-asperity contact between surfaces. J. Phys. D Appl. Phys. 26 (1993) 2219-2225