Integrated microfluidic-microoptical systems fabricated by dry etching of soda-lime glass

Microelectronic Engineering

Volumn 85, Issue 2, 2008, Pages 465-469

  Vieillard, Julien ^a   Mazurczyk, Radoslaw ^a   Boum, Lynda Lawrence ^a   Bouchard, Aude ^b   Chevolot, Yann ^a   Cremillieu, Pierre ^a   Hannes, Benjamin ^a   Krawczyk, Stanislas ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b IMEP LAHC   (France)

Author keywords

Dry etching; Lab on a chip; Microfluidic; Optical integration

Indexed keywords

ETCHING; GLASS; ION EXCHANGE; LIME; MICROOPTICS; MONOLITHIC INTEGRATED CIRCUITS; NANOFLUIDICS; OPTICAL DESIGN; PLASMA ETCHING;

ION EXCHANGE PROCESSES; MICRO FLUIDIC; MICRO FLUIDIC CHANNELS; MICRO-OPTICAL SYSTEMS; MONOLITHICALLY INTEGRATED; OPTICAL CHARACTERISTICS; REACTIVE ION; SODA-LIME GLASS (SLG); SUBSTRATE MATERIALS; WAVE-GUIDING;

REACTIVE ION ETCHING;

EID: 43449104800     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.08.005     Document Type: Article

References (22)

1. Mazurczyk R., Vieillard J., Bouchard A., Hannes B., and Krawczyk S. Sensor. Actuator. B 118 (2006) 11-19
2. Mogensen K.B., El-Ali J., Wolff A., and Kutter J.P. Appl. Opt. 42 19 (2003) 4072-4079
3. Mogensen K.B., Klank H., and Kutter J.P. Electrophoresis 25 (2004) 3498-3512
4. Leeds A.R., Keuren E.R.V., Durst M.E., Schneider T.W., Currie J.F., and Paranjape M. Sensor. Actuator. A 115 (2004) 571-580
5. Lin C.H., Lee G.B., Fu L.M., and Chen S.H. Biosensor. Bioelectron. 20 (2004) 83-90
6. Legrand J., and Glorieux P. Europe. J. Phys. 15 (1994) 228-235
7. Balslev S., Jorgensen A.M., Bilenberg B., Mogensen K.B., Snakenborg D., Geschke O., Kutter J.P., and Kristensen A. Lab Chip 6 (2006) 213-217
8. Ruano J.M., Benoit V., Aitchison J.S., and Cooper J.M. Anal. Chem. 72 (2000) 1093-1097
9. Kitagawa F., Kubota K., Sueyoshi K., and Otsuka K. Sci. Technol. Adv. Mater. 7 (2006) 558-565
10. Vieillard J., Mazurczyk R., Morin C., Hannes B., Chevolot Y., Desbène P.L., and Krawczyk S. J. Chromatogr. B 845 (2007) 218-225
11. Noutsios P.C., and Yip G.L. Opt. Lett. 15 (1990) 212-214
12. Benech P., Persegol D., and Saint Andre F. J. Phys. D: Appl. Phys. 23 (1990) 617-619
13. Mogensen K.B., Kwok Y.C., Eijkel J.C.T., Petersen N.J., Manz A., and Kutter J.P. Anal. Chem. 75 (2003) 4931-4936
14. Bu M., Melvin T., Ensell G.J., Wilkinson J.S., and Evans A.G.R. Sensor. Actuator. A 115 (2004) 476-482
15. Ronggui S., and Righini G.C. J. Vaccum Sci. Technol. A 95 (1991) 2709-2712
16. Li X., Abe T., and Esashi M. Sensor. Actuator. A 87 (2001) 139-145
17. Leech P.W. Vacuum 55 (1999) 191-196
18. Ichiki T., Sugiyama Y., Taura R., Koidesawa T., and Horiike Y. Thin Solid Films 435 (2003) 62-68
19. Ceriotti L., Weible K., de Rooij N.F., and Verpoorte E. Microelectron. Eng. 67-68 (2003) 865-871
20. Rodriguez I., Spicar-Mihalic P., Kuyper C.L., Fiorini G.S., and Chiu D.T. Anal. Chimica Acta 496 (2003) 205-215
21. Park J.H., Lee N.E., Lee J., Park J.S., and Park H.D. Microelectron. Eng. 82 (2005) 119-128
22. Thiénot E., Domingo F., Cambril E., and Gosse C. Microelectron. Eng. 83 (2006) 1155-1158