Quadrupole-based glow discharge mass spectrometer: Design and results compared to secondary ion mass spectrometry analyses

Vacuum

Volumn 81, Issue 10, 2007, Pages 1323-1327

  Konarski, Piotr ^a   Kaczorek, Krzysztof ^a   Ćwil, Michał ^a,b   Marks, Jerzy ^a  

^a TELE AND RADIO RESEARCH INSTITUTE   (Poland)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Glow discharge mass spectrometry (GDMS); Ion sputtering; Secondary ion mass spectrometry (SIMS)

Indexed keywords

ELECTROCHEMICAL ELECTRODES; GLOW DISCHARGES; IONIZATION; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; STAINLESS STEEL;

ENERGY FILTERS; ION SPUTTERING; MATRIX EFFECTS; QUADRUPOLE SPECTROMETERS;

MASS SPECTROMETERS;

EID: 34249941180     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.01.038     Document Type: Article

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