Integration of optical polymer pillars chip I/O interconnections with Si MSM photodetectors

IEEE Transactions on Electron Devices

Volumn 51, Issue 7, 2004, Pages 1084-1090

  Bakir, Muhannad S ^a   Chui, Chi On ^b   Okyay, Ali K ^b   Saraswat, Krishna C ^b   Meindl, James D ^a  

^a IEEE   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL SEMICONDUCTOR METAL PHOTODETECTORS; OPTICAL MICROGRAPHS; OPTICAL POLYMER PILLARS; POLYMER FILM; POLYMER WAVEGUIDES;

CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PHOTODETECTORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS;

INTEGRATED OPTOELECTRONICS;

EID: 4344717055     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2004.830643     Document Type: Article

References (7)

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4. M. S. Bakir and J. D. Meindl, "Sea of polymer pillars electrical and optical chip I/O interconnections for gigascale integration," IEEE Trans. Electron Devices, vol. 51, July 2004.
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6. M. S. Bakir, T. K. Gaylord, O. O. Ogunsola, E. N. Glytsis, and J. D. Meindl, "Optical transmission of polymer pillars for chip I/O optical interconnections," IEEE Photon. Technol. Lett., vol. 16, pp. 117-119, Jan. 2004.
7. C. O. Chui, A. K. Okyay, and K. C. Saraswat, "Effective dark current suppression with asymmetric MSM photodetectors in Group IV semiconductors," IEEE Photon. Technol. Lett., vol. 15, pp. 1585-1587, Nov. 2003.