Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 86, Issue , 2003, Pages 385-386

  Brener, I ^a   Chu, P ^a   Tsai, M ^a   Pu, C ^a   Chou, M ^a   Dadap, J ^a   Lee, D ^a   Tang, B ^a   Peale, D ^a   Bonadeo, N ^a   Harel, R ^a   Wu, C ^a   Johnson, J ^a   Park, S ^a   Lee, S ^a   Tong, D ^a   Doran, R ^a   Bergman, K ^a   Chau, T ^a   Goldstein, E ^a   Lin, L ^a   Walker, J ^a   Zhong, W ^a   Gibson, R ^a   more..

^a Tellium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL COUPLING; OPTICAL CROSSCONNECTS (OXC); SENSING ELECTRODES; FREE-SPACE OPTICAL; FULL CLOSED LOOPS; MEMS MIRRORS; MICROMECHANICAL DEVICE; OPTICAL CONTROL; OPTICAL POWER; SERVO CONTROL; SWITCHING TIME;

CLOSED LOOP CONTROL SYSTEMS; EQUATIONS OF MOTION; MICROELECTROMECHANICAL DEVICES; NONLINEAR CONTROL SYSTEMS; OPTICAL SWITCHES; OPTIMIZATION; SAMPLING; SERVOMECHANISMS; SINGLE CRYSTALS; SPURIOUS SIGNAL NOISE; TORQUE; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATIC ACTUATORS; MIRRORS; MOEMS; NONLINEAR OPTICS; OPTICAL COMMUNICATION; OPTICAL FIBER COMMUNICATION; OPTICAL FIBERS; OPTICAL SENSORS; TELECOMMUNICATION NETWORKS;

MIRRORS; OPTICAL SWITCHES;

EID: 12144290909     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. P.B. Chu et al, IEEE Communication Magazine, (80) March 2002.
2. O. Degani, et al., JMEMS, 7(4), 373 (1998).
3. M.S.C. Lu and G.K. Fedder, Tech. Dig. IEEE Solid-State Sensor Actuator Workshop, Hilton Head Island, 255 (2002).
4. S. Blackstone and T.J. Brosnihan, Proc. IEEE/LEOS Int. Conf. Optical MEMS'01, Okinawa, Japan, 35 (2001).
5. G.F. Franklin et al., Digital Control of Dynamic Systems, Addison Wesley, Menlo Park, California, 1998, pp.323-325.