Preparation of BaTiO3 thin films by mist plasma evaporation on MgO buffer layer

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1535-1538

  Huang, Hui ^a   Yao, Xi ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

C. Dielectric properties; D. BaTiO3; Mist plasma evaporation

Indexed keywords

ATMOSPHERIC PRESSURE; BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; COUPLED CIRCUITS; DROP BREAKUP; ELECTRIC PROPERTIES; EVAPORATION; MOLYBDENUM COMPOUNDS; MORPHOLOGY; PERMITTIVITY; PEROVSKITE; SOLUTIONS; TITANIUM COMPOUNDS;

COUPLED PLASMA; MIST PLASMA EVAPORATION; PRECURSORS; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 4344641280     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.092     Document Type: Conference Paper

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