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Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 965-968

Optical diagnostics for particle-cleaning process utilizing laser-induced shockwave

(2) Lim, H a Kim, D a

a Pohang University of Science and Technology (POSTECH) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVES; CAMERAS; FAST FOURIER TRANSFORMS; IRRADIATION; LASER PULSES; PARAMETER ESTIMATION; PHOTOACOUSTIC EFFECT; PHOTOGRAPHY; SILICON WAFERS; VAN DER WAALS FORCES;

LASER-INDUCED SHOCKWAVES; OPTICAL DIAGNOSTICS; PLASMA IGNITION; SHADOWGRAPHY;

SHOCK WAVES;

EID: 4344635475 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2584-3 Document Type: Conference Paper

Times cited : (24)

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