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Zhongguo Jiguang/Chinese Journal of Lasers
Volumn 31, Issue 6, 2004, Pages 701-704
Influence of deposition temperature on the properties of ZrO2 films prepared by electron beam evaporation
Author keywords

Deposition temperature; Electron beam evaporation; Thin film physics; ZrO2 films
Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRODEPOSITION; ELECTRON BEAMS; OPTICAL PROPERTIES; RESIDUAL STRESSES; THIN FILMS; X RAY DIFFRACTION;
EID: 4344632173     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (12)
References (11)
  • 2
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    • Characterization of zirconia films deposited by r. f. magnetron sputtering
    • S. Ben Amor, B. Rogier, G. Baud et al.. Characterization of zirconia films deposited by r. f. magnetron sputtering [J]. Materials Science and Engineering, 1998, B57: 28-39
    • (1998) Materials Science and Engineering , vol.B57 , pp. 28-39
    • Ben Amor, S.1    Rogier, B.2    Baud, G.3
  • 4
    • 0032047763 scopus 로고    scopus 로고
    • XRD and TEM study of heteroepotaxial growth of zirconia on magnesia single crystal
    • R. Guinebretiere, B. Soulestin, A. Dauger. XRD and TEM study of heteroepotaxial growth of zirconia on magnesia single crystal [J]. Thin Solid Films, 1998, 319: 197-201
    • (1998) Thin Solid Films , vol.319 , pp. 197-201
    • Guinebretiere, R.1    Soulestin, B.2    Dauger, A.3
  • 5
    • 0023435634 scopus 로고
    • Characterization of r. f. - sputtered zirconia coating
    • N. Iwamoto, Y. Makino, M. Kamai. Characterization of r. f. - sputtered zirconia coating [J]. Thin Solid Films, 1987, 153: 233-241
    • (1987) Thin Solid Films , vol.153 , pp. 233-241
    • Iwamoto, N.1    Makino, Y.2    Kamai, M.3
  • 6
    • 0026707169 scopus 로고
    • A comparative study of the optical properties of zirconia thin films prepared by ion-assisted deposition
    • M. G. Krishna, K. N. Rao, S. Mohan. A comparative study of the optical properties of zirconia thin films prepared by ion-assisted deposition [J]. Thin Solid Films, 1992, 207: 248-251
    • (1992) Thin Solid Films , vol.207 , pp. 248-251
    • Krishna, M.G.1    Rao, K.N.2    Mohan, S.3
  • 7
    • 0032095419 scopus 로고    scopus 로고
    • Influence of substrate temperature and target composition on the properties of yitta-stabilized thin films grown by r. f. reactive magnetron sputtering
    • M. Boulouz, A. Boulouz, A. Giani et al.. Influence of substrate temperature and target composition on the properties of yitta-stabilized thin films grown by r. f. reactive magnetron sputtering [J]. Thin Solid Films, 1998, 323: 85-92
    • (1998) Thin Solid Films , vol.323 , pp. 85-92
    • Boulouz, M.1    Boulouz, A.2    Giani, A.3
  • 8
    • 0032021650 scopus 로고    scopus 로고
    • Pulsed laser deposition of ceramic thin films using different laser sources
    • A. Husmann, J. Gottmann, T. Klotzbucher et al.. Pulsed laser deposition of ceramic thin films using different laser sources [J]. Surface and Coating Technology, 1998, 100-101: 411-414
    • (1998) Surface and Coating Technology , vol.100-101 , pp. 411-414
    • Husmann, A.1    Gottmann, J.2    Klotzbucher, T.3
  • 10
    • 4243244673 scopus 로고    scopus 로고
    • Crystallization and residual stress formation of sol-gel-derived zirconia films
    • A. Mehner, H. Klumper-Westkamp, F. Hoffman et al.. Crystallization and residual stress formation of sol-gel-derived zirconia films [J]. Thin Solid Films, 1997, 308-309: 363-368
    • (1997) Thin Solid Films , vol.308-309 , pp. 363-368
    • Mehner, A.1    Klumper-Westkamp, H.2    Hoffman, F.3
  • 11
    • 3042586366 scopus 로고
    • Beijing: Science Press
    • L. Actuok. Thin Film! Physics [M]. Beijing: Science Press, 1986. 68-112
    • (1986) Thin Film Physics , pp. 68-112
    • Actuok, L.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.