Platinum film patterning by laser lift-off using hydrocarbon film on insulating substrates

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 1015-1018

  Morimoto, A ^a   Tanimura, H ^a   Yang, H ^a   Ohtsubo, S ^b   Kumeda, M ^a   Chen, X ^c  

^a KANAZAWA UNIVERSITY   (Japan)

^b ISHIKAWA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; DRY ETCHING; ELECTRON BEAMS; HYDROCARBONS; INSULATION; LASER BEAM EFFECTS; LOW TEMPERATURE OPERATIONS; PLASTIC FILMS; SPIN COATING; SUBSTRATES; THERMAL CONDUCTIVITY;

FUSED QUARTZ; LASER LIFT-OFF; LASER-PATTERNED APIEZON WAX; PARTIAL BLOCKING;

PLATINUM;

EID: 4344594981     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2617-y     Document Type: Conference Paper

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