Deformation analysis of a film-overlapped micro-pump membrane structure

Smart Materials and Structures

Volumn 17, Issue 2, 2008, Pages

  Lee, Fu Shin ^a   Wang, Pi Wen ^a   Chen, Chih Hsiung ^a  

^a HUAFAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELONGATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; POISSON RATIO; STRAIN MEASUREMENT;

COUPLING EFFECTS; FILM OVERLAPPED MEMBRANE STRUCTURES; SHEAR STRAIN EFFECTS;

METALLIC FILMS;

EID: 43249126328     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/17/2/025022     Document Type: Article

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