Excimer laser projection photoablation and lift-off process for patterning of indium-tin-oxide for cost-effective fabrication of flat-panel displays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6911, Issue , 2008, Pages

  Chae, Junghun ^a   Appasami, Sreeram ^b   Jain, Kanti ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b Anvik Corporation   (United States)

Author keywords

Excimer laser ablation; ITO patterning; Lift off; Low cost patterning; PDP; Photoablation; TFT LCD

Indexed keywords

LIQUID CRYSTAL DISPLAYS; PHOTORESISTS; SPUTTERING; SUBSTRATES;

EXCIMER LASER ABLATION; ITO PATTERNING; LOW COST PATTERNING; PHOTOABLATION;

EXCIMER LASERS;

EID: 43249113615     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.767827     Document Type: Conference Paper

References (7)

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