Characterization of modified surface of indium tin oxide film during process of laser patterning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 268-271

  Zeng, Ji Nan ^a   Koh, Hwee Lin ^a   Ren, Zhong Min ^a   Song, Wen Dong ^a   Lu, Yong Feng ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Indium Tin Oxide; KrF excimer laser patterning; Micro Raman; Optical transmission; XPS; XRD

Indexed keywords

CHEMICAL BONDS; GRAIN SIZE AND SHAPE; INDIUM COMPOUNDS; LASER ABLATION; LASER BEAM EFFECTS; LASER PULSES; MASKS; OPACITY; RAMAN SCATTERING; SURFACE TREATMENT; ULTRAVIOLET RADIATION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

LASER PATTERNING;

EXCIMER LASERS;

EID: 0036386045     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456855     Document Type: Conference Paper

References (11)

1. M.G. Mason, L.S. Hung, C.W. Tang, S.T. Lee, K.W. Wong, and M. Wang, J. Appl. Phys. 86, 1688 (1999).
2. M. Takai, D. Bollmann, and K. Haberger, Appl. Phys. Lett. 64, 2560 (1991).
3. H. Kim, C.M. Gilmore, A. Piqué, J.S. Horwitz, H. Murata, Z.H. Kafafi, and D.B. Chrisey, J. Appl. Phys. 86, 6451 (1999).
4. H. Peisert, T. Schwieger, M. Knupfer, M.S. Golden, and J. Fink, J. Appl. Phys. 88, 1535 (2000).
5. C.W. Tang and S.A. Van Slyke, Appl. Phys. Lett. 51, 913 (1987).
6. M. Hoheisel, A. Mitwalsky, and C. Mrotzek, Phys. Shams Solidi A 123, 461 (1991).
7. M. Mohri, H. Kakinuma, M. Sakamoto, and H. Sawai, Jpn. J. Appl. Phys. 29, L 1932 (1990).
8. O. Yavas and M. Takai, Appl. Phys. Lett 73, 2558 (1998).
9. O. Yavas and M. Takai, J. Appl. Phys. 85, 4207 (1999).
10. James G. Lunney, Richard R. O'Neill, and Karl Schulmeister, Appl. Phys. Lett. 59, 647.(1991).
11. M.H. Hong, Y.F. Lu, M. Meng, T.S. Low, Mat. Res. Soc. Symp. Proc. 526, 91 (1998).