A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting

Chinese Physics Letters

Volumn 23, Issue 3, 2006, Pages 732-734

  Fang, Hua Bin ^a   Liu, Jing Quan ^a   Xu, Zheng Yi ^b   Dong, Lu ^a   Chen, Di ^a   Cai, Bing Chu ^a   Liu, Yue ^b  

^a Shanghai Jiao Tong University   (China)

^b Honeywell Company   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC GENERATORS; PIEZOELECTRICITY;

COMPOSITE CANTILEVER; ELECTRICAL ENERGY; FABRICATION PROCESS; LOW-FREQUENCY VIBRATION; MICRO-FABRICATION; PIEZOELECTRIC POWER GENERATOR; POWER; RESONANT VIBRATIONS; SILICON-BASED; VIBRATION ENERGY HARVESTING;

ENERGY HARVESTING;

EID: 33644601183     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/23/3/057     Document Type: Article

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