Sub-surface retention of Pb atoms in silicon after low-energy ion implantation and electron beam annealing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1553-1557

  Markwitz, Andreas ^a   Baumann, Horst ^a   Davy, Perry ^a   Beckert, Clement ^a   Kennedy, John ^a  

^a GNS SCIENCE   (New Zealand)

Author keywords

Kinetic theory; Lead ion implantation; Out diffusion; Surface nanostructuring

Indexed keywords

ELECTRON BEAMS; EVAPORATION; KINETIC THEORY; LEAD; TEMPERATURE DISTRIBUTION;

ELECTRON BEAM ANNEALING; LEAD ION IMPLANTATION; ROOM TEMPERATURE; SURFACE NANOSTRUCTURING;

ION IMPLANTATION;

EID: 43149112049     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.01.044     Document Type: Article

References (20)

1. Markwitz A., Kennedy V.J., Johnson S., Trompetter W.J., Rudolphi M., and Baumann H. Nucl. Instr. and Meth. B 217 (2004) 583
2. Markwitz A., Johnson S., Rudolphi M., Baumann H., and Mücklich A. Appl. Phys. Lett. 86 (2005) 013108
3. Markwitz A., Johnson S., and Rudolphi M. Appl. Phys. Lett. 89 (2006) 153122
4. Johnson S., Markwitz A., Rudolphi M., and Baumann H. J. Appl. Phys. 96 (2004) 605
5. Johnson S., Markwitz A., Rudolphi M., Baumann H., Oei S.P., Teo K.B.K., and Milne W.I. Appl. Phys. Lett. 85 (2004) 3277
6. Johnson S., Markwitz A., Rudolphi M., Baumann H., Kuo P.-Y., Blaikie R., and Mücklich A. J. Appl. Phys. 97 (2005) 094301
7. Otto G., Hobler G., Palmetshofer L., and Pongratz P. Nucl. Instr. and Meth. B 255 (2007) 105
8. Bankov P., Kalitzova M., Karpuzov D., Zollo G., Vitali G., Pizzuto C., Angelov Ch., Faure J., and Kilian L. Vacuum 69 (2003) 455
9. Hsia Y.Y., Christodoulides C.E., and Carter G. Radiat. Eff. 38 (1978) 87
10. Ekman J., et al. Nucl. Instr. and Meth. B 249 (2006) 544
11. Markwitz A., and Kennedy J. Ion beam physics at Institute of Geological & Nuclear Science (GNS). New Zeal. Sci. Rev. 62 (2005) 129
12. Baumann H., and Bethge K. Nucl. Instru. and Meth. 189 (1981) 107
13. In: Tesmer J.R., and Nastasi M. (Eds). Handbook of Modern Ion Beam Materials Analysis (1995), Materials Research Society, USA
14. Rudolphi M., Markwitz A., and Baumann H. Surf. Interface Anal. 39 (2007) 698
15. Doolittle L.R. Nucl. Instr. and Meth. B 15 (1986) 227
16. Biersack J.P. Nucl. Instr. and Meth. B 27 (1987) 21
17. Atkins P.W. Physical Chemistry. third ed. (1987), Oxford University Press, UK
18. D.R. Lide, (Ed.), CRC Handbook of Chemistry and Physics, 82nd ed., 2001-2002, p. 4.
19. A. Markwitz, P. Davy, J. Kennedy, H. Baumann, Surf. Interface Anal., doi:10.1002/sia.2805 .
20. .