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Volumn 17, Issue 2, 2008, Pages

Experimental and theoretical evaluations of electron temperature in continuous electron beam generated plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TEMPERATURE; GAS DYNAMICS; MAGNETIC FIELD EFFECTS; PLASMA DENSITY; PLASMAS;

EID: 43149083883     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/025009     Document Type: Article
Times cited : (64)

References (35)
  • 12
    • 0343838655 scopus 로고
    • Diagnostics of plasmas for materials processing
    • Manos D M and Dylla H F 1989 Diagnostics of plasmas for materials processing Plasma Etching: An Introduction ed D M Manos and D L Flamm (London: Academic)
    • (1989) Plasma Etching: An Introduction
    • Manos, D.M.1    Dylla, H.F.2
  • 31
    • 43149111612 scopus 로고    scopus 로고
    • Slinker S P 2007 private communication
    • (2007)
    • Slinker, S.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.