Plasma etching of As2S3 films for optical waveguides

Journal of Non-Crystalline Solids

Volumn 354, Issue 27, 2008, Pages 3179-3183

  Choi, Duk Yong ^a   Maden, Steve ^a   Rode, Andrei ^a   Wang, Rongping ^a   Luther Davies, Barry ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Chalcogenides; Laser deposition; Planar waveguides; Processing

Indexed keywords

CHALCOGENIDES; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; PLANAR WAVEGUIDES; PLASMA ETCHING; PULSED LASER DEPOSITION; ULTRAVIOLET RADIATION;

CHALCOGENIDE GLASSES; INDUCTION POWER;

ARSENIC COMPOUNDS;

EID: 43049161312     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2008.01.014     Document Type: Article

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