Glass reflowed microlens array and its optical characteristics

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Volumn , Issue , 2007, Pages 75-76

  Lee, Sung Kil ^a   Kim, Man Geun ^a   Jo, Kyung Woo ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Focal length; Glass reflow; Microlens array; Transition temperature; Wet etching

Indexed keywords

COMPOSITE MICROMECHANICS; GLASS; HYDROFLUORIC ACID; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; OPTICAL DESIGN; OPTICAL GLASS; OPTICAL INSTRUMENT LENSES; PHOTONICS; PHOTORESISTS; RAY TRACING;

FOCAL LENGTH; GLASS PLATES; GLASS REFLOW; GLASS TRANSITION TEMPERATURE TG; HF SOLUTIONS; INTERNATIONAL CONFERENCES; MICRO LENSING; MICRO-LENS ARRAYS; MICROLENS ARRAY; NANO-PHOTONICS; OPTICAL CHARACTERISTICS; OPTICAL MEMS; REFLOW PROCESS; TRANSITION TEMPERATURE; WET ETCHING;

GLASS TRANSITION;

EID: 43049143748     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2007.4373847     Document Type: Conference Paper

References (5)

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5. P. Merz, et al., "A novel micromachining technology for structuring borosilicate glass substrates," Transducers '03, Boston, June 8-12, 2003, pp. 258-261