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Volumn 92, Issue 17, 2008, Pages

Dielectric constant boost in amorphous sesquioxides

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; MICROELECTRONICS; MOLECULAR DYNAMICS; PERMITTIVITY; POSITIVE IONS;

EID: 43049091872     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2917797     Document Type: Article
Times cited : (17)

References (15)
  • 1
    • 43049148802 scopus 로고    scopus 로고
    • See MRS Bulletin (3) (), special issue on advanced gate dielectrics for microelectronics.
    • See MRS Bulletin 27 (3) (2002), special issue on advanced gate dielectrics for microelectronics.
    • (2002) , vol.27
  • 3
    • 36449003275 scopus 로고
    • See, e.g., 0021-8979 10.1063/1.353856, ();, J. Appl. Phys. 98, 044102 (2005).
    • See, e.g., R. D. Shannon, J. Appl. Phys. 0021-8979 10.1063/1.353856 73, 348 (1993); T. Busani and R. A. B. Devine, J. Appl. Phys. 98, 044102 (2005).
    • (1993) J. Appl. Phys. , vol.73 , pp. 348
    • Shannon, R.D.1    Busani, T.2    Devine, R.A.B.3
  • 7
    • 43049085668 scopus 로고    scopus 로고
    • in Rare Earth Oxide Thin Films: Growth, Characterization and Applications, edited by M. Fanciulli and G. Scarel (Springer, Berlin);, in Advanced Gate Stacks on High-Mobility Semiconductors, edited by A. Dimoulas, E. Gusev, P. McIntyre, and M. Heyns (Springer, Berlin, 2006).
    • P. Delugas, V. Fiorentini, and A. Filippetti, in Rare Earth Oxide Thin Films: Growth, Characterization and Applications, edited by, M. Fanciulli, and, G. Scarel, (Springer, Berlin, 2006); V. Fiorentini, P. Delugas, and A. Filippetti, in Advanced Gate Stacks on High-Mobility Semiconductors, edited by, A. Dimoulas, E. Gusev, P. McIntyre, and, M. Heyns, (Springer, Berlin, 2006).
    • (2006)
    • Delugas, P.1    Fiorentini, V.2    Filippetti, A.3    Fiorentini, V.4    Delugas, P.5    Filippetti, A.6
  • 9
    • 8744274081 scopus 로고    scopus 로고
    • 1364-2812 10.1080/13642819608239107, ();, J. Chem. Soc., Faraday Trans. 93, 629 (1997).
    • J. D. Gale, Philos. Mag. B 1364-2812 10.1080/13642819608239107 73, 3 (1996); J. D. Gale, J. Chem. Soc., Faraday Trans. 93, 629 (1997).
    • (1996) Philos. Mag. B , vol.73 , pp. 3
    • Gale, J.D.1    Gale, J.D.2
  • 12
    • 0001084315 scopus 로고    scopus 로고
    • 0163-1829 10.1103/PhysRevB.55.10337, ();, Phys. Rev. B 0163-1829 10.1103/PhysRevB.55.10355 55, 10355 (1997);, Rev. Mod. Phys. 73, 515 (2001).
    • X. Gonze, Phys. Rev. B 0163-1829 10.1103/PhysRevB.55.10337 55, 10337 (1997); X. Gonze and C. Lee, Phys. Rev. B 0163-1829 10.1103/PhysRevB.55.10355 55, 10355 (1997); S. Baroni, S. de Gironcoli, A. Dal Corso, and P. Giannozzi, Rev. Mod. Phys. 73, 515 (2001).
    • (1997) Phys. Rev. B , vol.55 , pp. 10337
    • Gonze, X.1    Gonze, X.2    Lee, C.3    Baroni, S.4    De Gironcoli, S.5    Dal Corso, A.6    Giannozzi, P.7


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