Evaluation of surface roughness based on monochromatic speckle correlation using image processing

Precision Engineering

Volumn 32, Issue 3, 2008, Pages 196-206

  Dhanasekar, B ^a   Mohan, N Krishna ^a   Bhaduri, Basanta ^a   Ramamoorthy, B ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Autocorrelation; Speckle correlation; Speckle image; Surface roughness

Indexed keywords

AUTOCORRELATION; FREQUENCY DOMAIN ANALYSIS; GRINDING (MACHINING); IMAGE PROCESSING; LASER BEAMS; MILLING (MACHINING); SPECKLE;

OPTICAL PATH DIFFERENCE; PARTIALLY COHERENT LIGHT BEAMS; SPECKLE CORRELATIONS; SPECKLE IMAGE; SPECTRAL SPECKLE CORRELATION;

SURFACE ROUGHNESS;

EID: 42949177486     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.08.005     Document Type: Article

References (23)

1. Whitehouse D.J. Stylus contact method for surface metrology in the ascendancy. Meas Cont 31 2 (1998) 48-50
2. Whitehouse D.J. Handbook of Surface and Nanometrology (2003), Institute of Physics Publishing (IOP), London
3. Lenz F.Y., and Shamir J. Optical profiler. A new method for high sensitivity and wide dynamic range. J Appl Opt 21 (1982) 3200-3208
4. O'Donell K.A. Effects of finite stylus width in surface contact profilometry. J Appl Opt 25 (1993) 4922-4928
5. Kiran M., Ramamoorthy B., and Radhakrishnan V. Evaluation of surface roughness by vision system. Int J Machine Tools Manuf 38 (1998) 685-690
6. Persson U. Real time measurement of surface roughness on ground surfaces using speckle-contrast technique. Opt Laser Eng 17 (1992) 61-67
7. Persson U. Measurement of surface roughness on rough machined surface using speckle correlation and image analysis. Wear 160 (1993) 221-225
8. Ruffung B. Application of speckle-correlation methods to surface roughness measurement: a theoretical study. J Opt Soc Am A3 (1986) 1297-1304
9. Tay C.J., Toh S.L., Shang H.M., and Zhang J.B. Whole field determination of surface roughness by speckle correlation. J Appl Opt 34 (1995) 2324-2335
10. Beckmann P. The scattering of light by rough surfaces. Prog Opt 6 (1967) 53-68
11. Fujii H., Asakura T., and Shindo Y. Measurement of surface roughness properties by using image speckle contrast. J Opt Soc Am 66 (1976) 1217-1221
12. Sprague R.A., and Thompson B.J. Quantitative visualization of large variation phase objects. J Appl Opt 11 (1972) 1469-1479
13. Yoshimura T., Kato K., and Nakagawa K. Surface roughness dependence of the intensity correlation function under speckle pattern illumination. J Opt Soc Am 7 (1990) 2254
14. Yamaguchi I., Kobayashi K., and Yaroslavsky L. Measurement of surface roughness by speckle correlation. Soc Photo-Optical Instrum Eng 43 11 (2004) 2753-2761
15. Lukaszewsk K., Rozniakowski K., and Wojtatowicz T. Laser examination of cast surface roughness. Soc Photo-Optical Instrum Eng 40 9 (2001) 1993-1997
16. Elson J.M., and Bennett J.M. Vector scattering theory. J Opt Eng 18 (1979) 116-124
17. Persson U. Measurement of surface roughness using infrared scattering. Measurement 18 (1996) 109-116
18. Wang SH, Quan C, Tay CJ, Shang HM. Surface roughness measurement in the submicrometer range using later scattering 2000;39:1591-1601.
19. Dainty J.C. Laser Speckle and Related Phenomena (1984), Springer, New York
20. Sirohi R.S. Speckle Metrology (1998), McGraw-Hill, New York
21. Box G.E.P., and Behnken D.W. Technometrics 2 (1960) 455
22. ISO 4288:1996, Geometrical product specification (GPS)-surface texture: profile method-terms definitions and surface texture parameters, Inst. Std. Org., Geneva.
23. Luk F., Huynh V., and North W. Measurement of surface roughness by a machine vision. J Phys E Sci Instrum 22 (1989) 977-980