Measurement of surface roughness by speckle correlation

Optical Engineering

Volumn 43, Issue 11, 2004, Pages 2753-2761

  Yamaguchi, Ichirou ^a   Kobayashi, Koichi ^b   Yaroslavsky, Leonid ^c  

^a GUNMA UNIVERSITY   (Japan)

^b Toyo Seiki Seisaku sho Ltd   (Japan)

^c TEL AVIV UNIVERSITY   (Israel)

Author keywords

Correlation analysis; Laser speckle; Stylus method; Surface roughness

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; CORRELATION METHODS; FOURIER TRANSFORMS; LASER BEAMS; OPTICAL SYSTEMS; SURFACE ROUGHNESS;

LASER SPECKLE; STYLUS METHOD;

SPECKLE;

EID: 11244329075     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1797851     Document Type: Article

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