Effect of magnesium doping on the structural and piezoelectric properties of sputtered ZnO thin film

Sensors and Actuators, A: Physical

Volumn 144, Issue 1, 2008, Pages 105-108

  Water, Walter ^a   Yan, Yin Shiang ^b   Meen, Teen Hang ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b TUNG NAN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Love wave; Magnesium; ST cut quartz; Zinc oxide

Indexed keywords

DOPING (ADDITIVES); ELECTROMECHANICAL COUPLING; MAGNESIUM; MAGNETRON SPUTTERING; PIEZOELECTRICITY; SURFACE MORPHOLOGY; X RAY DIFFRACTION; ZINC OXIDE;

LOVE WAVES; PIEZOELECTRIC PROPERTIES; TEMPERATURE COEFFICIENTS;

THIN FILMS;

EID: 42949169401     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.12.007     Document Type: Article

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