Influence of moisture on BCN (low-K) film for interconnection reliability

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 628-632

  Aoki, Hidemitsu ^a   Watanabe, Daisuke ^a   Moriyama, Ryota ^a   Mazumder, M K ^a   Komatsu, Naoyoshi ^a   Kimura, Chiharu ^a   Sugino, Takashi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

BCN; Cu; Dielectric constant; Low K; Moisture; TDS; Water

Indexed keywords

BORON CARBIDE; COPPER COMPOUNDS; LEAKAGE CURRENTS; LSI CIRCUITS; MOISTURE; POROUS MATERIALS; WATER TREATMENT;

BORON CARBON NITRIDE (BCN); CAPACITANCE-VERSUS-VOLTAGE (C-V); CURRENT-VERSUS-VOLTAGE (I-V); THERMAL DESORPTION SPECTROSCOPY (TDS);

DIELECTRIC FILMS;

EID: 42949091498     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.08.043     Document Type: Article

References (16)

1. Grill A., and Patel V. Appl. Phys. Lett. 79 (2001) 803
2. Chikaki S., et al. Interconnect Technology Conference. Proceedings of the IEEE 2005 International 48 (2005)
3. Umeda S., Yuki T., Sugiyama T., and Sugino T. Diamond and Relat. Mater. 13 (2004) 1135
4. Watanabe K., Taniguchi T., and Kanda H. Nat. Mater. 3 (2004) 404 June
5. Sugino T., Tanioka K., Kawasaki S., and Shirafuji J. Jpn. J. Appl. Phys. 36 (1997) 463
6. Loh K.P., Sakaguchi I., Gamo M.N., Tagawa S., Sugino T., and Ando T. Appl. Phys. Lett. 74 (1999) 28
7. Soltani A., Thevenin P., Bakhtiar H., and Bath A. Thin Solid Films 471 (2005) 277
8. Kimura C., Okada K., Funakawa S., Sakata S., and Sugino T. Diamond Relat. Mater. 14 (2005) 719
9. Uchida Y., Hishiya S., Fujii N., Kohmura K., Nakayama T., Tanaka H., and Kikkawa T. Microelectron. Eng. 83 11-12 (2006) 2126
10. H. Aoki, H. Shima, C. Kimura, T. Sugino, Diamond and Relat. Mater. (in press).
11. Polo M.C., Wang W.L., Sánchez G., Andújar J.L., and Esteve J. Diamond Relat. Mater. 6 (1997) 579
12. Peng J., Zhang P., Guo Y., and Chen G.H. Mater. Lett. 29 4-6 (1996) 191
13. Zhng M., Nakayama Y., Miyazaki T., and Kume M. J. Appl. Phys. 85 (1996) 2904
14. Han H.X., and Feldman B.J. Solid State Commun. 65 9 (1988) 921
15. Zhang Z., Kimura C., and Sugino T. J. Appl. Phys. 98 (2005) 036105
16. Pollak M., and Shklovskii B. Modern problems in condensed matter sciences vol. 28 (1991) p. 207