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Volumn 86, Issue 1, 2006, Pages 3-12

Influence of hydrogen on electrical properties of pt/(Ba,Sr)Tio3/pt thin film capacitors

(2) Morito, Kentaro a Sasajima, Yuichi a

Author keywords

Barium strontium titanate; Built in electric field; Capacitor; Hydrogen; Leakage current; Secondary ion mass spectroscopy (SIMS); Sputtering; Thermal desorption spectroscopy (TDS); Thin film

Indexed keywords

BARIUM STRONTIUM TITANATE; BUILT-IN ELECTRIC FIELD; CONCENTRATION OF; DEGRADATION MECHANISM; ELECTRICAL PROPERTY; ENERGY STATE; HYDROGEN ACCUMULATION; RF-SPUTTERING; SECONDARY ION MASS SPECTROSCOPY; SECONDARY ION MASS SPECTROSCOPY (SIMS); SIMS PROFILE; THERMALLY STABLE; THERMALLY UNSTABLE; THIN-FILM CAPACITORS;

BARIUM; BARIUM TITANATE; CAPACITANCE; CAPACITORS; DEGRADATION; ELECTRIC FIELDS; IONS; MASS SPECTROMETERS; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; STRONTIUM; STRONTIUM COMPOUNDS; SURFACE CHEMISTRY; THERMAL DESORPTION; THERMAL DESORPTION SPECTROSCOPY; THIN FILM CIRCUITS; THIN FILM DEVICES; THIN FILMS;

HYDROGEN;

EID: 42949083810 PISSN: 10584587 EISSN: 16078489 Source Type: Journal
DOI: 10.1080/10584580601085578 Document Type: Article

Times cited : (5)

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