Influence of annealing atmosphere on the structure, resistivity and transmittance of InZnO thin films

Ceramics International

Volumn 34, Issue 4, 2008, Pages 1089-1092

  Lee, Chongmu ^a   Lee, Wangwoo ^a   Kim, Hojin ^a   Kim, Hyoun Woo ^a  

^a Inha University   (South Korea)

Author keywords

Electrical properties; Optical properties; Transparent conducting oxide; ZnO

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OPACITY; THERMAL EFFECTS; THIN FILMS;

ANNEALING TEMPERATURE; ELECTRICAL RESISTIVITIES; OXYGEN ATMOSPHERE; TRANSMITTANCE;

INDIUM COMPOUNDS;

EID: 42649118463     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2007.09.053     Document Type: Article

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