Influence of ZnO buffer layer thickness on electrical and optical properties of GZO thin films deposited on polymer substrates

Materials Science and Technology

Volumn 23, Issue 3, 2007, Pages 303-306

  Kim, S ^a   Lee, W ^a   Lee, C ^a  

^a Inha University   (South Korea)

Author keywords

Buffer layer; Electrical resistivity; Ga doped ZnO; RF magnetron sputtering; Transparent conducting oxide

Indexed keywords

BUFFER LAYERS; CARRIER CONCENTRATION; CARRIER MOBILITY; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYETHYLENE TEREPHTHALATES; ZINC OXIDE;

POLYMER SUBSTRATES; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTORS;

THIN FILMS;

EID: 34548829373     PISSN: 02670836     EISSN: None     Source Type: Journal    
DOI: 10.1179/174328407X158721     Document Type: Article

References (10)

1. H. L. Hartnagel, A. L. Dawar, A. K. Jain and C. Jagadish: 'Semiconducting transparent thin films'; 1995, Bristol, Institute of Physics Publishing.
2. M. Hiramatsu, K. Imaeda, N. Horio and T Goto: J. Vac. Sci. Technol. A, 1998, 16A, 669.
3. M. Chen, Z. L. Pei, C. Sun, J. Gong, R. F. Huang and L. S. Wen: Mater. Sci. Eng. B, 2001, B85, 212.
4. T. Minami, H. Sato, H. Nanto and S. Takata: Jpn J. Appl. Phys., 1985, 24, L781.
5. H. J. Ko, Y. F. Chen, S. K. Hong, H. Wenisch, T. Yao and D. C. Look: Appl. Phys. Lett., 2000, 77, 3761.
6. V. Assuncao, E. Fortunato, A. Marquesa, H. Aguasa, I. Ferreira, M. E. V. Costa and R. Martins: Thin Solid Films, 2003, 427, 401-405.
7. Dupont Teijin Films: 'Kaladex 1020', Technical data sheet KXTD 005-K1020, Dupont Teijin Films, Wilton, UK, 2006.
8. K. Ellmer: J. Phys. D Appl. Phys., 2000, 33, R17-R32.
9. M. Fahland, P. Karlsson and C. Charton: Thin Solid Films, 2001, 392, 334-337.
10. X. W. Sun, L. D. Wang and H. S. Kwok: Thin Solid Films, 2000, 360, 75-81.