An isotropic suspension system for a biaxial accelerometer using electroplated thick metal with a HAR SU-8 mold

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Lee, Jin Seung ^a   Lee, Seung S ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; MICROMACHINING; MICROSTRUCTURE; SILICON ON INSULATOR TECHNOLOGY;

BIAXIAL ACCELEROMETER; HAR SU-8 MOLD; ISOTROPIC SUSPENSION SYSTEM;

ACCELEROMETERS;

EID: 42549154179     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025036     Document Type: Article

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