Design principle of suspension of MEMS gyroscope

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 242-245

  Shi, Qin ^a   Wang, Shourong ^a   Qiu, Anping ^a   Xu, Yishen ^a   Ji, Xunsheng ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

Design principle; MEMS gyroscope; Quadrature error; Stiffness matrix; Suspension spring

Indexed keywords

COMPOSITE MICROMECHANICS; GYROSCOPES; MATRIX ALGEBRA; MEMS; MICROELECTROMECHANICAL DEVICES; MOLECULES; NEMS; SERPENTINE; SILICATE MINERALS; SPRINGS (COMPONENTS); STIFFNESS; SUSPENSIONS (COMPONENTS);

DESIGN PRINCIPLES; FEM SIMULATIONS; INTERNATIONAL CONFERENCES; MEMS GYROSCOPES; MOLECULAR SYSTEMS; PAPER ADDRESSES; QUADRATURE ERRORS; SUSPENSION SPRINGS; SYSTEM STIFFNESS;

STIFFNESS MATRIX;

EID: 42549134160     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334695     Document Type: Conference Paper

References (10)

1. Moorthi Palaniapan, "Integrated Surface Micromachined Frame Microgyroscopes",Ph.D. University of California at Berleley,2002
2. William Albert Clark, "Micromachined Vibratory Rate Gyroscopes",Ph.D. University of California at Berkeley,1997
3. Bao.Y.Yeh.Yung C.Liang. " Modeling and Compensation of Quadrature Error for Silicon MEMS Microgyroscope", Power Electronics and Drive Systems, 4th IEEE International Conference,Oct 2001, Vol.2,pp: 871-876
4. Robert P.Leland, "Adaptive Mode Tuning for Vibrational Gyroscopes", IEEE Transactions on control systems technology ,2003,Vol. 11,No.2,pp:242-247
5. Yoichi Mochida, Masaya Tamura,Kuniki Ohwada, "A Micromachined Vibrating Rate Gyroscope With Independent Beams for the Drive and Detection Modes", MEMS '99,1999,618-623
6. Sitaraman V.Iyer, "Modeling and Simulation of Non-Idealities in a Z-axis CMOS-MEMS Gyroscope"Ph.D. Carnegie Mellon University Pittsburgh, at Pennsylvania,2003
7. Gary Keitn Fedder, "Simulation of Microelectromechanical Systems"Ph.D. Engineering-Electrical engineering and computer sciences, University of California at Berkeley, 1994
8. MaoCheng Wang, Min Shao, "Theory and Numeric Method of Finite Element", Tshing University Publishing Inc.,1988 ,23-216
9. Hao Yilong, Zhang Lixian, Li Ting, Zhang Dacheng, "Technology of Silicon Based MEMS", Journal of Mechanical Strength, Vol.23,No.4, 2001,523-526
10. LiuFang Zhang, "Mechanics of Materials", WUHAN University of Technology Publishing Inc.,2002,204-205