Charge dissipation in e-beam lithography with Novolak-based conducting polymer films

Nanotechnology

Volumn 19, Issue 12, 2008, Pages

  Abargues, R ^a,b   Nickel, U ^a   Rodriguez Canto P J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b UNIVERSITY OF VALENCIA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTING POLYMERS; ELECTRON BEAM LITHOGRAPHY; INSULATING MATERIALS; POLYMERIZATION;

CHARGE DISSIPATION; CONDUCTING LAYERS; CONDUCTING POLYMER FILMS; SURFACE LAYERS;

POLYMER FILMS;

COPPER DERIVATIVE; MONOMER; POLYMER; SOLVENT; THIOPHENE;

ARTICLE; CHEMICAL REACTION; ELECTRIC CONDUCTIVITY; ELECTRON BEAM; FILM; OXIDATION; POLYMERIZATION; PRIORITY JOURNAL; SOLUBILITY; THICKNESS;

EID: 42549145517     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/12/125302     Document Type: Article

References (25)

1. Curnmings K D and Kiersh M J 1989 Vac. Sci. Technol. B 7 1536
2. Itoh H, Nakamura K and Hayakawa H J 1989 Vac. Sci. Technol. B 7 1532
3. Liu W, Ingino J and Pease R F 1995 J. Vac. Sci. Technol. B 13 1979
4. Lee Y, Lee W and Chun K 2000 J. Vac. Sci. Technol. B 18 3095
5. Leibold B, Butschke J, Bettin L, Beyer D, Irmscher M, Koepernik C, Plontke R, Vix A and Voehringer P 2003 Proc. SPIE 5256 1034
6. Heeger A J 2001 Angew. Chem. Int. Edn Engl. 40 2591
7. Prou A and Rannou P 2002 Prog. Polym. Sci. 27 135
8. Goldenberg L M and Lacaze P C 1993 Synth. Met. 58 271
9. Jones S 1988 Polypyrroles in Encyclopedia of Polymer Science and Engineering vol 13 (New York: Wiley) p 42
10. Chan H S O and Ng S C 1998 Prog. Polym. Sci. 23 1167
11. Gospodinova N and Terlemezyan L 1998 Prog. Polym. Sci. 23 1443
12. Bredas J L and Street G B 1985 Acc. Chem. Res. 18 309
13. Heeger A J 2001 Angew. Chem. 113 2660
14. Winokur M, Moon Y B, Heeger A J, Barker J, Bott D C and Shirakawa H 1987 Phys. Rev. Lett. 58 2329
15. Sirringhaus H et al 1999 Nature 401 685
16. Street R A 2006 Nat. Mater. 5 171
17. Kaiser A B 2001 Rep. Prog. Phys. 64 1
18. Angelopoulos M, Shaw J M, Kaplan R D and Perreault S 1989 J. Vac. Sci. Technol. B 7 1519
19. Angelopoulos M, Shaw J M, Lee K L, Huang W S, Lecorre M A and Tissier M 1991 J. Vac. Sci. Technol. B 9 3428
20. Klempner D, Sperling L H and Utraki L A 1994 Interpenetrating Polymer Networks. Advances in Chemistry (Washington, DC: American Chemical Society) p 239
21. Toshima N and Hara S 1995 Prog. Polym. Sci. 20 155
22. Inoue M B, Vazquez E F and Inoue M 1998 Synth. Met. 24 223
23. Stauffer D and Aharony A 1994 Introduction to Percolation Theory (London: Taylor and Francis)
24. Fraysse J, Planes J and Dufresne A 2000 Mol. Cryst. Liq. Cryst. 354 511
25. Skotheim T A 1986 Handbook of Conducting Polymers vol 1 (New York: Dekker)