Micropatterning layers by flame aerosol deposition-annealing

Advanced Materials

Volumn 20, Issue 16, 2008, Pages 3005-3010

  Tricoli, Antonio ^a   Graf, Markus ^b   Mayer, Felix ^b   Kühne, Stéphane ^a   Hierlemann, Andreas ^a   Pratsinis, Sotiris E ^a  

^a ETH ZURICH   (Switzerland)

^b Sensirion AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; ANNEALING; ATMOSPHERIC AEROSOLS; BIOMECHANICS; CHEMICAL MODIFICATION; CHEMICAL REACTIONS; COMBUSTION; CRACKING (CHEMICAL); DEPOSITION; FLAME SPRAYING; FLAMMABILITY; METALLIC COMPOUNDS; NANOPARTICLES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; PESTICIDES; PROTECTIVE COATINGS; PYROLYSIS; RESPIRATORY MECHANICS; SMOKE; THERMOCHEMISTRY;

AEROSOL DEPOSITIONS; CLUSTER BEAM DEPOSITIONS; COMBUSTION CHEMICAL VAPOR DEPOSITIONS; DIRECT SYNTHESES; FLAME SPRAY PYROLYSISES; HIGH-TEMPERATURE; METAL OXIDE LAYERS; METAL OXIDES; MICROELECTRONIC; MICROPATTERNED; MICROPATTERNING; SPRAY SOLUTIONS;

SPRAY PYROLYSIS;

EID: 42549119130     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200701844     Document Type: Article

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