Silicon thermal microrelays with multiple switching states

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 612-615

  Hiltmann, K ^a   Ashauer, M ^a   Sandmaier, H ^a   Lang, W ^a  

^a Institute für Mikro und Informationstechnik   (Germany)

Author keywords

Micromachined switches; Silicon; Thermal microrelays; Thermopneumatics

Indexed keywords

ACTUATORS; MICROMACHINING; PRESSURE TRANSDUCERS; SEMICONDUCTOR SWITCHES; SWITCHING FUNCTIONS;

SILICON THERMAL MICRORELAYS; THERMOPNEUMATIC RELAYS;

SEMICONDUCTOR RELAYS;

EID: 0031177333     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01608-7     Document Type: Article

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