The first light of a single-stage MEMS x-ray optic

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6688, Issue , 2007, Pages

  Koshiishi, Masaki ^a   Ezoe, Yuichiro ^a,b   Mita, Makoto ^a   Maeda, Yoshitomo ^a   Mitsuda, Kazuhisa ^a   Suzuki, Masaki ^c   Osawa, Takeyuki ^c   Hoshino, Akio ^c   Ishisaki, Yoshitaka ^c   Takano, Takayuki ^d   Maeda, Ryutaro ^d  

^a JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^c TOKYO METROPOLITAN UNIVERSITY   (Japan)

^d NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Light weight; MEMS; X ray astronomy; X ray optics

Indexed keywords

ANISOTROPIC ETCHING; COMPUTER SIMULATION; MEMS; REFLECTION; SILICON; WET ETCHING;

ANISOTROPIC WET ETCHING; X RAY ASTRONOMY;

X RAY OPTICS;

EID: 42249107671     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733912     Document Type: Conference Paper

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